@article{article, title  = {{P-type delta doping in silicon MBE}},

 url = {{}},

 year = {{1990}},

 month = {{1}},

 author = {{Mattey NL and Hopkinson M and Houghton RF and Dowsett MG and McPhail DS and Whall TE and Parker EHC and Booker GR and Whitehurst J}},

 doi = {{10.1016/0040-6090(90)90392-Q}},

 volume = {{184}},

 journal = {{Thin Solid Films}},

 issue = {{1-2}},

 pages = {{15-19}},

 note = {{Accessed on 2024/12/27}}}